Ultra-high vacuum

Ultra-high Vacuum

Ultra-High Vacuum
Rigaku has developed a magnetic rotary seal unit featuring a unique structural system (Japanese patent no.3006780) as a rotary feedthrough system for ultra-high vacuum. The evacuation of an interstage port keeps oil mist and microbubbles of magnetic fluid base liquid from entering the vacuum side, preventing the contamination of the vacuum. The chamber remains in an ultra-high vacuum state as a result of differential pumping through an orifice. High torque can be transmitted with this unit.

Example of a UHV magnetic rotary feedthrough system

Ultra-high Vacuum Example System

Specifications and features

Ultra-High Vacuum
  • Pressure: up to 10-8 Pa

  • Temperature range: 0 to 80ºC

  • Rotation: 100 to 700 rpm

  • Evacuation: differential pumping

  • Ultra-high vacuum (up to 10-8 Pa) is achieved by an orifice effect and the adoption of differential pumping that prevents base liquid mist from entering the ultra-high vacuum side

  • High RPM operating speeds

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